According to different application requirements, use Cobetter's know-how and experience to customize the product.
Dual-layer membrane structure, to provide higher filtration efficiency for more sophisticated semiconductor process.
Using high purity PE structure and apply the ultra-clean technology to ensure filter's cleanliness.
Photoresist Filtration
Solvent Filtration
Photochemical Filtration
Higher Efficiency
Naturally Hydrophilic
Better Initial Cleanliness
100% Integrity Tested
| Cartridge | Capsule | |
| Filter Membrane | Nylon 66 | |
| Support | HDPE / PP | |
Cage/Core/End Caps | HDPE / PP | |
| O-ring | TEV or EPDM | |
Shell （Capsule only） | HDPE / PP | |
| Max. Operating Temperature | 50°C | 38°C |
| Max. Operating Pressure | 0.28MPa @ 25°C | 0.34MPa @ 25°C |
| Filter Areas | X1 (?68mm) | X2 (?68mm) |
| 0.9 m2/10" | 1.4 m2/10" | |
Ordering Information
| PPM | 1 | 2 | OTC | 3 | 4 | 5 | 6 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | Block 6 |
Diameter | Removal Ratings | Nominal Length | O-ring Material | Cleanliness | Package |
X1=?68mm X2=?68mm | NM02=2nm NM05=5nm NM10=10nm NM20=20nm NM40=40nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0065=0.65μm 0100=1.0μm 0300=3.0μm 0500=5.0μm | 04=4" 10=10" 20=20" | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
| PPN | 1 | 2 | 3 | OTC | 4 | 5 | 6 | 7 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | Block 6 | Block 7 |
Diameter | Diameter | Removal Ratings | Nominal Length | O-ring Material | Cleanliness | Package |
_ = HDPE P = PP
| Z1=?83mm X1=?68mm | NM02=2nm NM05=5nm NM10=10nm NM20=20nm NM40=40nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0065=0.65μm 0100=1.0μm 0300=3.0μm 0500=5.0μm | 04=4" 10=10" 20=20" | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
F016 / F040 / 118 Serise
PPN | 1 | 2 | 3 | 4 | 5 | 6 |
| PPF1 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 6 | Block 6 |
Diameter | Removal Ratings | Length | O-ring Material | Cleanliness | Package |
S = ?60mm
| NM20=20nm NM50=50nm 0010=0.1μm 0020=0.2μm 0100=1.0μm | F016E=51.5±0.5mm F040E=112±1.0mm 118E=123.5±1.0mm | P=TEV E=EPDM | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW |
Capsule
| PPN | 1 | 2 | 3 | 4 | 5 |
| Block 1 | Block 2 | Block 3 | Block 4 | Block 5 | |||
Membrane | Removal Ratings | Fitting Type | Inlet/Outlet | Vent/Drain | O-ring Material | Package | |
_ = HDPE P = PP | NM02=2nm NM05=5nm NM10=10nm NM20=20nm NM40=40nm 0010=0.1μm 0020=0.2μm 0045=0.45μm 0065=0.65μm 0100=1.0μm 0300=3.0μm 0500=5.0μm | HDPE SW44E=SW SW984E=SW PL54LE=CPL PL54ME=CPL NPT42E=NPT FL64E=CFL PP BFL64-4=CFL BFL64-10=CFL BFL64-20=CFL FL64=CFL PL64M=CPL PL64L=CPL PL54M=CPL PL54L=CPL NPT42=NPT NPT742=NPT NPT942=NPT SW43=SW SW743=SW SW943=SW SW44=SW SW744=SW SW944=SW SW84=SW SW784=SW SW984=SW SW764=SW CBT0M=CPL CBT0L=CPL CBT3M=CPL CBT3L=CPL CBT8M=CPL CBT8L=CPL | 1/4" 1/4" 1/2" 8mm 8mm 1/4" 3/8" 3/8" 3/8" 3/8" 3/8" 3/8" 3/8" 8mm 8mm 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/2" 1/2" 1/2" 3/8" 1/4" 1/4" 3/8" 3/8" 8mm 8mm | 4mm 1/4" 1/4" 4mm 4mm 1/8" 1/4" 1/4" 1/4" 1/4" 1/4" 4mm 4mm 4mm 4mm 1/8" 1/8" 1/8" 4mm 4mm 4mm 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 1/4" 4mm 4mm | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW | |
| PPN | 1 | 2 | 3 | 4 |
| Block 1 | Block 2 | Block 3 | Block 4 | |||
Removal Ratings | Fitting Type | Inlet/Outlet | Vent/Drain | O-ring Material | Package | |
NM02=2nm NM03=3nm NM05=5nm NM07=7nm NM10=10nm NM15=15nm NM20=20nm NM30=30nm 0010=0.1μm 0020=0.2μm | SW43E=SW SW44E=SW SW984E=SW PL54LE=CPL PL54ME=CPL NPT42E=NPT FL64E=CFL | 1/4" 1/4" 1/2" 8mm 8mm 1/4" 3/8" | 4mm 1/4" 1/4" 4mm 4mm 1/8" 1/4" | UU= Super clean grade UH= High clean grade U= Semicon grade E= Electronic grade | D=Dry W=Prewet, UPW | |
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