CMPN Filter Cartridges use a unique rolled structure which ensures the precise filtration of CMP slurry. It captures the large particles efficiently and lets the usable particles pass through. The graded pore size from outside to inside increases the dirt holding capacity and extend the filter service life.

Feature and Benefits

Low Extraction Level

An all polypropylene construction and thermal bonding technology eliminates the use of adhesives and enables the lowest extraction level

Efficient Filtration

The unique rolled structure provides accurate separation of CMP slurry, captures large particles and releases usable particles.

No Fiber Releasing
The special external mesh eliminates fibers released from the filter.

Graded Pore Structure

Graded pore size structure eliminates the condensate slurry from blocking the membrane surface increasing the usability of porous area.